The reliability of Embedded System Hardware (ESH) is very important, which is directly related to the quality and longevity of the embedded system. To analyze the reliability of ESH, it was studied on the perspective of hardware using Copula function. At first, abstract formalization of the ESH was defined from composition level. Then reliability modeling of each function module of the ESH was given by considering integration of hardware and software, as well as using Copulas function to establish the reliability model of ESH. Finally, the parameters of the proposed reliability model were estimated, and a specific calculation example by using this proposed model was put forward and compared with some other Copulas functions. The result shows that the proposed model using Copula function is effective.