改进的硅各向异性腐蚀GPU并行模拟

改进的硅各向异性腐蚀GPU并行模拟

陈劲源李建华郭卫斌

Improved parallel simulation of silicon anisotropic etching based on GPU

CHEN Jingyuan LI Jianhua GUO Weibin

计算机应用 . 2013, (12): 3317 -3320 .